The present invention provides the following process for producing and the like, which enables the production of an ether compound, which is useful for chemical amplification type resist compositions, synthetic intermediates of pharmaceuticals, paints, or the like, with less side reaction and in high yield.
A process for producing an ether compound having a group represented by the general formula (II)
wherein R
1
, R
2
and R
3
may be the same or different, and represent substituted or unsubstituted alkyl, substituted or unsubstituted aryl or substituted or unsubstituted aralkyl, or R
1
and R
2
form cycloalkyl together with an adjacent carbon atom,
which comprises allowing a compound having a hydroxyl group (including a carboxyl group) to react with an alkenyl ether represented by the general formula (I)
wherein R
1
, R
2
and R
3
have the same significances as defined above respectively.
本发明提供了以下用于生产等的过程,使得能够以较少的副反应和高收率生产对
化学放大型抗蚀剂组合物、制药
中间体、油漆或类似物有用的醚化合物。一种生产醚化合物的过程,该醚化合物具有由通式(II)表示的基团,其中R1、R2和R3可以相同或不同,并且分别表示取代或未取代的烷基、取代或未取代的芳基或取代或未取代的芳基烷基,或者R1和R2与相邻的
碳原子一起形成环状烷基,该过程包括使具有羟基(包括羧基)的化合物与由通式(I)表示的
烯基醚反应,其中R1、R2和R3分别具有上述定义的相同意义。