β-Methoxy-propionsaeure-vinylester | 33561-27-2

• 分子结构分类: 有机化合物 - 有机酸及其衍生物 - 羧酸及其衍生物
• 英文名称: β-Methoxy-propionsaeure-vinylester
• 英文别名: Ethenyl 3-methoxypropanoate
• CAS: 33561-27-2
• 化学式: C₆H₁₀O₃
• 分子量: 130.144
• InChiKey: ZOQUSVISPGHUAV-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  0.4
• 重原子数：
  9
• 可旋转键数：
  5
• 环数：
  0.0
• sp3杂化的碳原子比例：
  0.5
• 拓扑面积：
  35.5
• 氢给体数：
  0
• 氢受体数：
  3

文献信息

• CURABLE COMPOSITION, RESIST MATERIAL AND RESIST FILM
  申请人：DIC Corporation

  公开号：US20170306062A1

  公开（公告）日：2017-10-26

  A problem of The present invention is to provide a curable composition capable of forming a resist which can be easily washed after curing and which has high dry etching resistance and excellent precision of fine pattern transfer, also provide a resist film and a laminate each containing the curable composition, and further provide a pattern forming method using the resist film. The problem of the present invention can be solved by providing a curable composition containing a multifunctional polymerizable monomer (A) which has two or more groups having a polymerizable group and has at least one group Q having a polymerizable group represented by formula (1) below, the amount of silicon atoms in an nonvolatile content being 10 wt % or more.