Compositions comprising a polymer of organometallic polymerizable monomer acid or ester are useful as resists and are sensitive to imaging irradiation while exhibiting enhanced resistance to reactive ion etching.
由含有有机
金属可聚合单体酸或酯的聚合物组成的复合物可用作抗蚀剂,并对成像辐射敏感,同时表现出增强的反应离子刻蚀抗性。