Provided is a method for polishing a silicon wafer that can effectively obtain a high-grade surface. The method for polishing a silicon wafer includes an intermediate polishing step of polishing a silicon wafer with a polishing slurry Sp containing abrasive grains and a final polishing step of polishing the silicon wafer with a polishing slurry Sf containing abrasive grains. The polishing slurry Sp has a relative haze Hp greater than a relative haze Hf of the polishing slurry Sf and less than 6.8 times as high as the relative haze Hf of the polishing slurry Sf.
本发明提供了一种能有效获得高档表面的
硅晶片抛光方法。 抛光
硅晶片的方法包括用含有磨粒的抛光浆料 Sp 抛光
硅晶片的中间抛光步骤和用含有磨粒的抛光浆料 Sf 抛光
硅晶片的最后抛光步骤。 抛光浆料 Sp 的相对雾度 Hp 大于抛光浆料 Sf 的相对雾度 Hf,且小于抛光浆料 Sf 的相对雾度 Hf 的 6.8 倍。