Preparation and Physical Properties of Sulfur Compounds Related to Petroleum. VII. 2-, 6- and 8-Thiabicyclo[3.2.1]octane and 2-Thiabicyclo[2.2.2]octane
Resist composition, method of forming resist pattern, novel compound, and acid generator
申请人:Kawaue Akiya
公开号:US20100136478A1
公开(公告)日:2010-06-03
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) containing a compound having a cation moiety represented by general formula (I) (in the formula, R
5
represents an organic group having a carbonyl group, an ester bond or a sulfonyl group; and Q represents a divalent linking group).