PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR MANUFACTURING CURED RESIN FILM, AND SEMICONDUCTOR DEVICE
申请人:Toray Industries, Inc.
公开号:EP3267254A1
公开(公告)日:2018-01-10
Provided is a photosensitive resin composition containing: one or more kinds of alkali-soluble resins selected from a polyimide, a polybenzoxazole, a polyimide precursor, a polybenzoxazole precursor, and a copolymer formed of two or more polymers selected from the preceding substances; and a photosensitizer. The photosensitive resin composition further contains a compound represented by general formula (1). Even when a cured film is fired at low temperature, the photosensitive resin composition exhibits superior adhesion properties with metallic materials, particularly copper, and also exhibits high chemical resistance.
本发明提供了一种光敏树脂组合物,其中含有:一种或多种选自聚酰亚胺、聚苯并恶唑、聚酰亚胺前体、聚苯并恶唑前体和两种或多种选自前述物质的聚合物形成的共聚物的碱溶性树脂;以及一种光敏剂。光敏树脂组合物还含有通式(1)所代表的化合物。即使在低温下烧制固化薄膜,光敏树脂组合物也能与金属材料,特别是铜,表现出优异的粘合性能,并具有很高的耐化学性。