A low dielectric material is produced by using a composition including a borazine ring-containing compound and a compound represented by the following formula as a solvent, and/or by annealing a composition comprising a borazine ring-containing compound under atmosphere of oxygen concentration not higher than 0.1 vol % at 200 to 600° C. In the following formula, R
a
and R
c
independently represent alkyl group or acyl group; R
b
represents hydrogen atom or alkyl group; and n represents an integer of 1 to 5.
使用包含
硼氮
杂环化合物和下列公式所代表的化合物作为溶剂的组合物,和/或在
氧气浓度不高于0.1体积%的气氛下,在200至600°C下退火含有
硼氮
杂环化合物的组合物,可以制备出低介电常数材料。在下面的公式中,Ra和Rc分别代表烷基或酰基;Rb代表氢原子或烷基;n表示1到5的整数。