申请人:FUJI PHOTO FILM CO., LTD.
公开号:EP0445819A2
公开(公告)日:1991-09-11
A novel positive type photoresist composition is provided comprising a quinodiazide compound and an alkali-soluble resin as essential components, characterized in that there is contained at least one of compounds represented by formulae (I) to (VI):
The positive type photoresist of the present invention exhibits excellent sensitivity, percent film remaining, resolution, heat resistance, resist shape and developability.
本发明提供了一种新型正型光刻胶组合物,该组合物由一种喹吖啶化合物和一种碱溶性树脂作为基本成分组成,其特征在于其中含有至少一种由式(I)至(VI)表示的化合物:
本发明的正型光刻胶具有优异的灵敏度、残膜率、分辨率、耐热性、抗蚀剂形状和显影性。