DROZD, V. N.;VYAZGIN, A. S., ZH. ORGAN. XIMII, 1985, 21, N 6, 1335-1340
作者:DROZD, V. N.、VYAZGIN, A. S.
DOI:——
日期:——
COMPOSITION FOR FORMING PATTERN, KIT, CURED FILM, LAMINATE, PATTERN PRODUCING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT
申请人:FUJIFILM Corporation
公开号:US20220009153A1
公开(公告)日:2022-01-13
Provided are: a composition for forming a pattern, which contains a polymerizable compound, a photopolymerization initiator, and a sensitizer containing two or more of at least one kind of atom selected from the group consisting of a nitrogen atom and a sulfur atom, in which a length of a specific atom chain from one atom to another atom among the two or more atoms is 2 or 3 in terms of the number of atoms; a kit to which the composition for forming a pattern is applied; a cured film; a laminate; a pattern producing method; and a method for manufacturing a semiconductor element.