Sulfonate salts have the formula: R
1
COOCH
2
CH
2
CF
2
CF
2
SO
3
−
M
+
wherein R
1
is alkyl, aryl or hetero-aryl, M
+
is a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oxime sulfonates and sulfonyloxyimides derived from these salts are effective photoacid generators in chemically amplified resist compositions.
磺酸盐的
化学式为:R1COOCH2CH2
CF2CF2SO3−M+,其中R1是烷基、芳基或杂环芳基,M+是Li、Na、K、
铵或
四甲基铵离子。从这些盐衍生出的季
铵盐、
肟磺酸盐和磺酰氧基
亚胺在
化学增强型光刻胶组合物中是有效的光酸发生剂。