tetrabutylammonium 1,1,3,3,3-pentafluoro-2-(pivaloyloxy)propanesulfonate | 956470-41-0

• 分子结构分类: 有机化合物 - 有机酸及其衍生物 - 有机磺酸及其衍生物
• 英文名称: tetrabutylammonium 1,1,3,3,3-pentafluoro-2-(pivaloyloxy)propanesulfonate
• 英文别名: 2-(2,2-Dimethylpropanoyloxy)-1,1,3,3,3-pentafluoropropane-1-sulfonate;tetrabutylazanium
• CAS: 956470-41-0
• 化学式: C₈H₁₀F₅O₅S*C₁₆H₃₆N
• 分子量: 555.691
• InChiKey: VCRWNUFMFMMELI-UHFFFAOYSA-M

计算性质

• 辛醇/水分配系数(LogP)：
  6.65
• 重原子数：
  36
• 可旋转键数：
  16
• 环数：
  0.0
• sp3杂化的碳原子比例：
  0.96
• 拓扑面积：
  91.9
• 氢给体数：
  0
• 氢受体数：
  10

文献信息

• PATTERN-FORMING METHOD, AND COMPOSITION FOR FORMING RESIST UNDERLAYER FILM
  申请人：MATSUMURA Yushi

  公开号：US20120285929A1

  公开（公告）日：2012-11-15

  Providing a method for forming a pattern capable of forming a resist underlayer film that can be easily removed using an alkali liquid while maintaining etching resistance is objected to. Provided by the present invention is a method for forming a pattern, the method including: (1) forming a resist underlayer film on a substrate using a composition for forming a resist underlayer film containing a compound having an alkali-cleavable functional group; (2) forming a resist pattern on the resist underlayer film; (3) forming a pattern on the substrate by dry etching of the resist underlayer film and the substrate, using the resist pattern as a mask; and (4) removing the resist underlayer film with an alkali liquid.
• US7514202B2
  申请人：——

  公开号：US7514202B2

  公开（公告）日：2009-04-07
• US8859191B2
  申请人：——

  公开号：US8859191B2

  公开（公告）日：2014-10-14
• US9046769B2
  申请人：——

  公开号：US9046769B2

  公开（公告）日：2015-06-02