申请人:Sumitomo Chemical Company, Limited
公开号:EP3556781A1
公开(公告)日:2019-10-23
Disclosed is a resin comprising a structural unit derived from a compound represented by formula (I') and a structural unit having an acid-labile group:
wherein R1 and R2 each independently represent an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom,
Ar represents an aromatic hydrocarbon group which may have a substituent,
L1 represents a group represented by formula (X1-1), etc.,
L11, L13, L15 and L17 each independently represent an alkanediyl group,
L12, L14, L16 and L18 each independently represent -O-, -CO-, - CO-O-, -O-CO- or -O-CO-O-, and
* and ** are bonds, and ** represents a bond to an iodine atom.
本发明公开了一种树脂,该树脂包含由式(I')代表的化合物衍生的结构单元和具有酸亲和基的结构单元:
其中 R1 和 R2 各自独立地代表一个烷基,该烷基可带有一个卤素原子、一个氢原子或一个卤素原子、
Ar 代表芳香烃基团,可带有取代基、
L1 代表式 (X1-1) 所代表的基团等、
L11、L13、L15 和 L17 各自独立地代表一个烷二基、
L12、L14、L16 和 L18 各自独立地代表-O-、-CO-、-CO-O-、-O-CO-或 -O-CO-O-,以及
* 和 ** 是键,** 代表与碘原子的键。