Toward Environmentally Friendly Photolithographic Materials: A New Class of Water-Soluble Photoresists
作者:Shintaro Yamada、Thomas Mrozek、Timo Rager、Jordan Owens、Jose Rangel、C. Grant Willson、Jeffery Byers
DOI:10.1021/ma034461r
日期:2004.1.1
the films and the decarboxylation of the malonate half-esters. The rates of decarboxylation depend on the structure of substituents at the 2-position of the malonates. The choice of acid-labile esters, the structure of the half-esters, and the polymer compositions were carefully optimized, and high-resolution positive tone images were obtained that were fully processed in aqueous media.
合成了具有两个官能团的新的水溶性苯乙烯聚合物,丙二酸半酯的侧挂侧铵盐和酸不稳定的烷基酯,并对其进行水溶性正型光刻胶的应用进行了评估。这些聚合物具有两个溶解度开关:通过烘烤使整个薄膜不溶解和在暴露于紫外线下选择性溶解。烘焙膜的时间分辨FT-IR测量表明,氨从膜上依次蒸发,丙二酸酯半酯脱羧。脱羧速率取决于丙二酸酯2位上取代基的结构。酸不稳定酯的选择,半酯的结构和聚合物组成均经过仔细优化,