Reductive Elimination of Hypersilyl Halides from Zinc(II) Complexes. Implications for Electropositive Metal Thin Film Growth
摘要:
Treatment of Zn(Si(SiMe3)(3))(2) with ZnX2 (X = Cl, Br, I) in tetrahydrofuran (THF) at 23 degrees C afforded [Zn(Si(SiMe3)(3))X(THF)](2) in 83-99% yield. X-ray crystal structures revealed dimeric structures with Zn2X2 cores. Thermogravimetric analyses of [Zn(Si(SiMe3)(3))X(THF)](2) demonstrated a loss of coordinated THF between 50 and 155 degrees C and then single-step weight losses between 200 and 275 degrees C. The nonvolatile residue was zinc metal in all cases. Bulk thermolyses of [Zn(Si(SiMe3)(3))X(THF)](2) between 210 and 250 degrees C afforded zinc metal in 97-99% yield, Si(SiMe3)(3)X in 91-94% yield, and THF in 81-98% yield. Density functional theory calculations confirmed that zinc formation becomes energetically favorable upon THF loss. Similar reactions are likely to be general for M(SiR3)(n)/MXn pairs and may lead to new metal-film-growth processes for chemical vapor deposition and atomic layer deposition.
Preparation and structural characterization of trimethylsilyl-substituted germylzinc halides, (Me3Si)3GeZnX (X=Cl, Br, and I) and silylzinc chloride, R(Me3Si)2SiZnCl (R=SiMe3 and Ph)
摘要:
The trimethylsilyl-substituted germylzine halides, (Me3Si)(3)GeZnX (X = Cl, Br, and 1), and silylzinc chlorides, R(Me3Si)(2)SiZnCl (R = SiMe3, Ph), have been prepared and their molecular structures have been full determined by spectroscopic and single-crystal Xray diffraction methods. The germylzinc halides and silylzinc chlorides have dimeric structures consisting of two mu-halogen atoms. The reactivity of germylzinc chloride with substrates is also examined. (C) 2003 Elsevier Science B.V. All rights reserved.
Deposition of metal films based upon complementary reactions
申请人:WAYNE STATE UNIVERSITY
公开号:US09540730B2
公开(公告)日:2017-01-10
A method comprises contacting a compound having formulae (1) with a compound having formula MLo to form a metal:
[M(SiR3)m(L1)p]n (1)
wherein
M is Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Al, a second row transition metal or a third row transition metal;
R are each independently H, C1-C6 alkyl or —Si(R″)3;
R″ are each independently H or C1-C6 alkyl;
m is an integer from 1 to 3;
n is a number representing the formation of aggregates or polymeric material;
L1 is a neutral donor ligand;
L is a ligand;
p is an integer from 0 to 6; and
o is an integer representing the number of ligands bonded to MLo.