Phosphanstabilisierte Silber(I)–Carboxylate: Synthese und Verwendung in der Silber-CVD
摘要:
The synthesis of the silver(I)-carboxylate complexes [(R-3'P)(n)AgO2CR] (n = 1, R'= "Bu: 3a, R = CF3; 3b, R = C2F5; R' = C6H4CH2NMe2-2: 3c, R = CF3; 3d, R = C2F5; n = 2, R' = "Bu: 4a, R = CF3; 4b: R = C2F5) succeeds, when [AgO2CR] (1a, R = CF3; 1b, R = C2F5) is reacted with n equivalents of PR3'(2a, R'= "Bu; 2b, R'= C6CH2NMe2-2) (n = 1, 2); the yield amounts to 83-98%. Complexes 3 and 4 can be used for the deposition of silver on titaniumnitride-coated SiO2-wafers by the chemical vapour deposition (CVD) process, which could be shown by applying 4a as suitable precursor. REM studies show that closed silver layers were formed with a silver particle size between 50 and 100 nm. (C) 2003 Elsevier Science B.V. All rights reserved.