Imino sulfonate photoacid generators (PAGs) sensitive to i- and g-line were synthesized using 9-fluorenone derivatives with aryl–ethynyl units as starting materials. The PAGs exhibited good thermal stability and photoreactivity at 365 (i-line) and 436 nm (g-line) compared with that of an imino sulfonate PAG synthesized from unfunctionalized 9-fluorenone.
使用具有芳基乙炔基单元的 9-芴酮衍生物作为起始材料合成了对 i 线和 g 线敏感的亚氨基磺酸盐光致产酸剂(PAG)。与由未官能化的 9-芴酮合成的亚氨基磺酸盐 PAG 相比,PAG 在 365 nm(i 线)和 436 nm(g 线)处表现出良好的热稳定性和光反应性。