In lithography, a composition comprising a novolak resin comprising recurring units of hydroxycoumarin is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO2 substrates.
在光刻技术中,一种由包含羟基
香豆素递归单元的
酚醛
树脂组成的组合物可用于形成光刻胶底层膜。该底层膜可在碱
水中剥离,而不会对离子注入
硅基底或
二氧化硅基底造成损坏。