申请人:President and Fellows of Harvard College
公开号:EP2857549A2
公开(公告)日:2015-04-08
The application discloses CVD of thin films employing amidinate complexes of the metals lithium, sodium, potassium, beryllium, calcium, strontium, barium, scandium, yttrium, lanthanum and the other lanthanide metals, titanium, zirconium, hafnium, vanadium, niobium, tantalum, molybdenum, tungsten, manganese, rhenium, iron, ruthenium, cobalt, rhodium, nickel, palladium, silver, Zinc, cadmium, tin, lead, antimony and bismuth as precursor. A novel cobalt precursor is also disclosed.
该申请公开了采用锂、钠、钾、铍、钙、锶、钡、钪、钇、镧和其他镧系金属的脒基络合物的 CVD 薄膜、钛、锆、铪、钒、铌、钽、钼、钨、锰、铼、铁、钌、钴、铑、镍、钯、银、锌、镉、锡、铅、锑和铋作为前体。此外,还公开了一种新型钴前体。