A radiation-sensitive resin composition comprising a quinonediazide-type radiation-sensitive resin and a compound generating an acid upon irradiation. Said radiation-sensitive resin composition can be used as a resist suitable for dry development by plasma etching and enables one to obtain an etching image having high precision with high reproducibility at a high degree of resolution and selectivity.
一种辐射敏感
树脂组合物,由一种醌
噻嗪类辐射敏感
树脂和一种在辐照时产生酸的化合物组成。所述辐射敏感
树脂组合物可用作适用于等离子体蚀刻干显影的抗蚀剂,能以高分辨率和高选择性获得高精度、高重现性的蚀刻图像。