申请人:JAPAN SYNTHETIC RUBBER CO., LTD.
公开号:EP0330406A2
公开(公告)日:1989-08-30
A radiation-sensitive resin composition comprising a quinonediazide-type radiation-sensitive resin and a compound generating an acid upon irradiation. Said radiation-sensitive resin composition can be used as a resist suitable for dry development by plasma etching and enables one to obtain an etching image having high precision with high reproducibility at a high degree of resolution and selectivity.
一种辐射敏感树脂组合物,由一种醌噻嗪类辐射敏感树脂和一种在辐照时产生酸的化合物组成。所述辐射敏感树脂组合物可用作适用于等离子体蚀刻干显影的抗蚀剂,能以高分辨率和高选择性获得高精度、高重现性的蚀刻图像。