Resist composition containing novel sulfonium compound, pattern-forming method using the resist composition, and novel sulfonium compound
申请人:Fujifilm Corporation
公开号:US08110333B2
公开(公告)日:2012-02-07
A resist composition includes (A) a compound represented by the following formula (I):
wherein each of R1 to R13 independently represents a hydrogen atom or a substituent, provided that at least one of R1 to R13 is a substituent containing an alcoholic hydroxyl group; Z represents a single bond or a divalent linking group; and X− represents an anion containing a proton acceptor functional group.
一种抗蚀组合物包括(A)由以下式(I)表示的化合物:其中R1到R13中的每个独立表示氢原子或取代基,前提是R1到R13中至少有一个是含有醇羟基的取代基;Z表示单键或二价连接基;X-表示含有质子受体功能基团的阴离子。