The present invention provides a photoresist composition comprising a resin, an acid generator and a compound represented by the formula (I):
wherein R
1
represents a C2-C12 alkyl group which can have one or more hydroxyl groups, etc.,
R
2
and R
3
each independently represent a hydrogen atom, etc.,
R
4
, R
5
and R
6
each independently represent a hydrogen atom, etc.,
A
1
represents a single bond or a C1-C2 alkylene group in which one or more —CH
2
— can be replaced by —O—.
SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME
申请人:YAMAGUCHI Satoshi
公开号:US20110171576A1
公开(公告)日:2011-07-14
A salt represented by the formula (I):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, L
1
represents *—CO—O-L
a
- or *—CH
2
—O-L
b
-, * represents a binding position to —C (Q
1
) (Q
2
)-, L
a
and L
b
independently represent a C1-C15 divalent saturated hydrocarbon group in which one or more —CH
2
— can be replaced by —O— or —CO—, ring W
1
represents a C2-C36 nitrogen-containing heterocyclic group in which one or more —CH
2
— can be replaced by —O—, and Z
1⊕
represents an organic counter ion.
SALT AND PHOTORESIST COMPOSITION COMPRISING THE SAME
申请人:ICHIKAWA Koji
公开号:US20110200940A1
公开(公告)日:2011-08-18
The present invention provides a salt represented by the formula (I):
wherein R
1
and R
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, X
1
represents a C1-C17 divalent saturated hydrocarbon group in which one or more —CH
2
— can be replaced by —O— or —CO— and which can have one or more fluorine atoms, R
3
represents a hydrogen atom or a methyl group, and Z
1+
represents an organic counter cation, and a photoresist composition containing the same.