HELLWINKEL D.; BOHNET S., CHEM. BER., 120,(1987) N 7, 1151-1173
作者:HELLWINKEL D.、 BOHNET S.
DOI:——
日期:——
PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, ELECTRONIC DEVICE, ACTIVE-LIGHT-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM AND MASK BLANK
申请人:FUJIFILM Corporation
公开号:US20170121437A1
公开(公告)日:2017-05-04
A pattern forming method includes forming a film using an actinic ray-sensitive or radiation-sensitive resin composition, exposing the film with active light or radiation, and developing the exposed film using a developer including an organic solvent, in which the actinic ray-sensitive or radiation-sensitive resin composition contains a compound having a partial structure represented by General Formula (I).