An actinic ray-sensitive or radiation-sensitive resin composition comprising (P) a resin having a repeating unit represented by the following formula (1), a resist film using the composition, and a pattern forming method.
一种感光
树脂组合物,其包括(P)一种具有以下式(1)所表示的重复单元的
树脂,使用该组合物的光阻膜以及一种图案形成方法。