Resist composition, method of forming resist pattern, novel compound, and acid generator
申请人:Hada Hideo
公开号:US20100119974A1
公开(公告)日:2010-05-13
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) including a compound represented by (b1-1), a compound represented by (b1-1′) and/or a compound represented by (b1-1″) (R
1
″-R
3
″ represents an aryl group or an alkyl group, provided that at least one of R
1
″-R
3
″ represents a substituted aryl group being substituted with a group represented by (b1-1-0), and two of R
1
″-R
3
″ may be mutually bonded to form a ring with the sulfur atom; X represents a C
3
-C
30
hydrocarbon group; Q
1
represents a carbonyl group-containing divalent linking group; X
10
represents a C
1
-C
30
hydrocarbon group; Q
3
represents a single bond or a divalent linking group; Y
10
represents —C(═O)— or —SO
2
—; represents a C
1
-C
10
alkyl group or a fluorinated alkyl group: Q
2
represents a single bond or an alkylene group; and W represents a C
2
-C
10
alkylene group).
POSITIVE RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND POLYMERIC COMPOUND
申请人:SESHIMO Takehiro
公开号:US20100297560A1
公开(公告)日:2010-11-25
A positive resist composition including a base component (A′) which exhibits increased solubility in an alkali developing solution under action of acid and generates acid upon exposure, the base component (A′) including a polymeric compound (A1′) having a structural unit (a5-1) represented by general formula (a5-1), a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a0-2) that generates acid upon exposure, the structural unit (a0-2) containing a group represented by general formula (a0-2′) (wherein represents an anion moiety represented by one of general formulas (1) to (5)).