ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, AND RESIST FILM AND PATTERN FORMING METHOD USING THE SAME
申请人:TAKAHASHI Hidenori
公开号:US20110318693A1
公开(公告)日:2011-12-29
An embodiment of the composition contains a resin (P) containing a repeating unit (A) that is configured to decompose when exposed to actinic rays or radiation to thereby generate an acid. The repeating unit (A) contains a cation structure with a monocyclic or polycyclic heterocycle containing a nitrogen atom.
The invention relates to radiation-curable coating substances containing NIR photoinitiators, to novel formulations of NIR photoinitiators and to the use of said substances.
RADIATION-CURABLE COATING MATERIALS
申请人:Haremza Sylke
公开号:US20110230617A1
公开(公告)日:2011-09-22
The present invention relates to radiation-curable coating materials comprising new photoinitiators, and to the use thereof.
RESIST COMPOSITION FOR SEMICONDUCTOR, AND RESIST FILM AND PATTERN FORMING METHOD USING THE SAME
申请人:TSUCHIMURA Tomotaka
公开号:US20110318691A1
公开(公告)日:2011-12-29
An embodiment of the composition contains any of compounds of general formula (I) below: