申请人:Arch Speciality Chemical, Inc.
公开号:US20040072095A1
公开(公告)日:2004-04-15
Radiation sensitive compositions for use in producing a patterned image on a substrate comprise:
e) a first photoacid generator (PAG) compound P1, which comprises one or more compounds of the structure (A);
f) a second photoacid generator compound P2 which comprises one or more compounds of the structure (B); and
g) a polymer component comprising an alkali soluble resin component whose alkali solubility is suppressed by the presence of acid sensitive moieties and whose alkali solubility is returned by treatment with an acid and, optionally, heat; wherein said polymer comprises one or more polymers comprising the monomer unit (C); and
h) a solvent
1
where R
1
and R
2
are each independently C
1
-C
12
fluoroalkyl groups or together R
1
and R
2
are joined with the N to form a (F
2
C)
y
N ring where y=4-12; R
3
, R
4
, and R
5
are each independently selected from unsubstituted aryl, alkyl or alpha-ketomethyl groups and such groups substituted with an acid sensitive group, or R
3
and R
4
together with the S atom form a cycloalkylsulfonium ring; R
6
to R
11
and R
6′
to-R
11′
are each independently selected from branched or linear alkyl, alkoxy, halogen, hydrogen, OCO
2
G, OCH
2
CO
2
G, or OG where G=an acid sensitive group;
2
where each R
12
is independently selected from a linear, cyclic, or branched C
1
-C
8
fluoroalkyl group, substituted or unsubstituted phenyl group, substituted or unsubstituted naphthalene group, C
6
-C
12
cyclic or alicyclic hydrocarbon, or a linear, cyclic, or branched C
1
-C
8
alkyl group;
3
wherein R
13
is selected from H, C
1
-C
4
lower alkyl, CN, or CH
2
CO
2
R
20
; R
14
and R
15
are each independently selected from H, linear or branched C
1
-C
4
alkyl, or halogen; R
16
is H, or branched or linear C
1
-C
4
alkyl; R
17
is selected from substituted or unsubstituted phenyl, a substituted or unsubstituted linear, branched or cyclic C
1
-C
20
alkyl, optionally containing an ether or ester group, a substituted or unsubstituted phenylalkylene or a substituted or unsubstituted C
6
-C
20
cyclic alkylene; R
18
and R
19
are independently selected from H, linear or branched or cyclic C
1
-C
14
alkyl, or C
7
-C
14
alicyclic; R
20
is selected from a C
1
-C
14
branched linear or cyclic alkyl, substituted or unsubstituted phenyl, or C
7
-C
14
alicyclic group.
用于在衬底上产生图案化图像的辐射敏感组分包括:e)第一种光酸发生剂(PAG)化合物P1,其包括一个或多个结构(A)的化合物;f)第二种光酸发生剂化合物P2,其包括一个或多个结构(B)的化合物;和g)聚合物组分,其包括一种碱溶性树脂组分,其碱溶性受到酸敏感基团的存在抑制,并且通过处理酸和(可选)热来恢复其碱溶性;其中所述聚合物包括一个或多个包含单体单元(C)的聚合物;和h)溶剂1,其中R1和R2分别是C1-C12氟烷基,或者R1和R2一起与N结合形成(F2C)yN环,其中y=4-12;R3、R4和R5各自独立地选自未取代的芳基、烷基或α-酮甲基基团以及带有酸敏感基团的这样的基团,或者R3和R4与S原子一起形成环状烷基磺鎓环;R6到R11和R6'到R11'各自独立地选自分支或线性烷基、烷氧基、卤素、氢、OCO2G、OCH2CO2G或OG,其中G=酸敏感基团;2其中每个R12独立地选自线性、环状或分支的C1-C8氟烷基,取代或未取代的苯基,取代或未取代的萘基,C6-C12环状或脂环烃,或线性、环状或分支的C1-C8烷基;3其中R13选自H、C1-C4低烷基、CN或CH2CO2R20;R14和R15各自独立地选自H、线性或分支的C1-C4烷基或卤素;R16选自H,或分支或线性的C1-C4烷基;R17选自取代或未取代的苯基、取代或未取代的线性、分支或环状C1-C20烷基,可选地含有醚或酯基团,取代或未取代的苯基烷基或取代或未取代的C6-C20环状烷基;R18和R19独立地选自H、线性或分支的C1-C14烷基或C7-C14脂环烃;R20选自C1-C14分支线性或环状烷基、取代或未取代的苯基或C7-C14脂环烃基团。