[EN] MULTIFUNCTIONAL UNSYMMETRICALLY SUBSTITUTED MONOMERS AND POLYARYLENE COMPOSITIONS THEREFROM [FR] MONOMERES MULTIFONCTIONNELS SUBSTITUES DE FAÇON DISSYMETRIQUE ET COMPOSITIONS DE POLYARYLENE COMPRENANT CES MONOMERES
[EN] MULTIFUNCTIONAL UNSYMMETRICALLY SUBSTITUTED MONOMERS AND POLYARYLENE COMPOSITIONS THEREFROM [FR] MONOMERES MULTIFONCTIONNELS SUBSTITUES DE FAÇON DISSYMETRIQUE ET COMPOSITIONS DE POLYARYLENE COMPRENANT CES MONOMERES
Process for making air gap containing semiconducting devices and resulting semiconducting device
申请人:Townsend III H. Paul
公开号:US20050124172A1
公开(公告)日:2005-06-09
A method of forming at least a partial air gap within a semiconducting device and the resulting devices, said method comprising the steps of: (a) depositing a sacrificial polymeric composition in one or more layers of the device during its formation; (b) coating the device with one or more layers of a relatively non-porous, organic, polymeric, insulating dielectric material (hardmask) having a density less than 2.2 g/cm
3
; and (c) decomposing the sacrificial polymeric composition such that the decomposition products permeate at least partially through the one or more hardmask layers, thereby forming at least a partial air gap within the device.
Multifunctional unsymmetrically substituted monomers and polyarylene compositions therefrom
申请人:Godschalx P James
公开号:US20060267000A1
公开(公告)日:2006-11-30
A monomer suitable for use in forming low dielectric constant films in semiconductor devices comprising i) two dienophile groups (A-functional groups) attached to a single aromatic ring and ii) a second ring structure comprising two conjugated carbon-to-carbon double bonds and a leaving group L (B-functional group), characterized in that said single aromatic ring is directly covalently attached to one of the double bonded carbons of the B functional group or to a fused aromatic ring containing two such double bonded carbons of the B-functional group, and one A-functional group of one monomer is capable of reaction under cycloaddition reaction conditions with the B-functional group of a second monomer to thereby form a polymer.
[EN] MULTIFUNCTIONAL UNSYMMETRICALLY SUBSTITUTED MONOMERS AND POLYARYLENE COMPOSITIONS THEREFROM<br/>[FR] MONOMERES MULTIFONCTIONNELS SUBSTITUES DE FAÇON DISSYMETRIQUE ET COMPOSITIONS DE POLYARYLENE COMPRENANT CES MONOMERES