There is disclosed A resist underlayer film composition, the resist underlayer film composition contains a truxene compound having a substituted or an unsubstituted naphthol group as shown by the following general formula (1). There can be provided a resist underlayer film composition to form a resist underlayer film being capable of reducing reflectance and having high etching resistance, heat resistance.
                            公开了一种抗蚀底层膜组合物,该抗蚀底层膜组合物包含一种三苯
乙烷化合物,其具有如下通式(1)所示的取代或未取代
萘酚基。可以提供一种抗蚀底层膜组合物,以形成一种能够减少反射并具有高蚀刻抗性和耐热性的抗蚀底层膜。