There is provided a method for producing a pattern, and the method includes forming a film by removing the solvent from a photosensitive resin composition containing (Component A) a polymer including a monomer unit (a1) having a residue of a carboxyl group or a phenolic hydroxyl group protected with an acid-decomposable group, and a monomer unit (a2) having an epoxy group and/or an oxetanyl group; (Component B) a photo acid generator; and (Component C) a solvent; exposing the film patternwise to an active radiation; developing the exposed film with an aqueous developer liquid to form a pattern; and baking the pattern by heating.
                            提供了一种生产图案的方法,该方法包括通过从含有(组分A)聚合物的光敏
树脂组成的溶剂中去除溶剂形成薄膜,其中聚合物包括具有羧基残基或
酚羟基残基的单体单位(a1)和酸分解性基团保护的单体单位(a2)具有环氧基团和/或氧杂环基团;(组分B)光酸发生剂;以及(组分C)溶剂;将薄膜以图案方式暴露于活性辐射下;用
水性显影液显影暴露的薄膜以形成图案;并通过加热烘烤图案。