申请人:Nippon Paint Co., Ltd.
公开号:EP0574939A1
公开(公告)日:1993-12-22
Disclosed is a positive type resist composition which can forms a good pattern by subjecting a resist layer to plural exposures and developments, which results in excellent adhesion between the resist layer and a substrate. The composition comprises:
(a) a polymer having an acid value of 2 to 200, prepared from 20 to 94 % by weight of a t-butyl ester of a α,β-ethylenically unsaturated carboxylic acid, 5 to 79 % by weight of a (meth)acrylate of the formula:
CH₂=C(R₁)-COO-(R₂-O)n-R₃ I
(wherein R₁ is hydrogen or a methyl group, R₂ is an alkylene group having 1 to 6 carbon atoms, R₃ is an alkyl group having 1 to 6 carbon atoms, an aryl group or an aralkyl group having 1 to 6 carbon atoms, and n is an integer of 1 to 10) and 1 to 75 % by weight of another α,β-ethylenically unsaturated compound; and
(b) a photoactivator which generates an acid in response to a light irradiation.
本发明公开了一种正型抗蚀剂组合物,通过对抗蚀剂层进行多次曝光和显影,可形成良好的图案,从而使抗蚀剂层与基底之间具有极佳的附着力。该组合物包括
(a) 一种酸值为 2 至 200 的聚合物,由 20% 至 94% (按重量计)的α,β-乙烯基不饱和羧酸的叔丁酯、5% 至 79% (按重量计)的式(甲基)丙烯酸酯制备而成:
CH₂=C(R₁)-COO-(R₂-O)n-R₃ I
(其中 R₁ 是氢或甲基,R₂ 是具有 1 至 6 个碳原子的亚烷基,R₃ 是具有 1 至 6 个碳原子的烷基、芳基或具有 1 至 6 个碳原子的芳烷基,n 是 1 至 10 的整数)和 1%至 75%(重量百分比)的另一种 α、β-乙烯基不饱和化合物;以及
(b) 光活化剂,在光照射下产生一种酸。