申请人:Rohm and Haas Electronic Materials LLC
公开号:US10719014B2
公开(公告)日:2020-07-21
New photoresist compositions are provided that comprise a component that comprises an amide group and multiple hydroxyl groups. Preferred photoresists of the invention may comprise a resin with photoacid-labile groups; a photoacid generator compound; and an amide component with multiple hydroxyl groups that can function to decrease undesired photogenerated-acid diffusion out of unexposed regions of a photoresist coating layer.
本发明提供的新型光刻胶组合物包含一种由酰胺基团和多个羟基组成的成分。本发明的优选光刻胶可包括具有光酸亲和基的树脂、光酸发生器化合物和具有多个羟基的酰胺成分,这些羟基的作用是减少光刻胶涂布层未暴露区域中不需要的光生酸扩散。