申请人:YAMAGUCHI Satoshi
公开号:US20120231392A1
公开(公告)日:2012-09-13
A salt represented by the formula (I) and a resist composition containing the salt are provided,
wherein Q
1
, Q
2
, L
1
, ring W
1
, R
e1
, R
e2
, R
e3
, R
e4
, R
e5
, R
e6
, R
e7
, R
e8
, R
e9
, R
e10
, R
e11
, R
e12
, R
e13
and Z are defined in the specification.