作者:Kathryn A. Berchtold、Jun Nie、Jeffrey W. Stansbury、Bilge Hacioǧlu、Eric R. Beckel、Christopher N. Bowman
DOI:10.1021/ma035862+
日期:2004.5.1
characteristics of the monomer. The experimental evaluations presented clearly demonstrate that each of these mechanisms contributes to the reactivity of these monomers and the networks that they form. The combination of these factors leads to cross-linked network formation and enhanced polymerization kinetics, i.e., monovinylmonomers with reactivities that rival those of commonly used divinylmonomers.
(Meth)arcrylic and (meth)acrylamide monomers, polymerizable compositions, and polymers obtained
申请人:Bowman N. Christopher
公开号:US20060252900A1
公开(公告)日:2006-11-09
The present invention provides novel (meth)acrylic and (meth)acrylamide monomers and polymers produced from those monomers. The monomers of the invention each include only a single vinyl functionality and at least one non-vinyl functionality that can be varied to achieve desired monomer/polymer properties. The invention additionally provides methods of producing polymers from these mono-vinyl monomers.
RESIST UNDERLAYER FILM-FORMING COMPOSITION COMPRISING POLYMER HAVING STRUCTURAL UNIT HAVING UREA LINKAGE
申请人:NISSAN CHEMICAL CORPORATION
公开号:US20200124965A1
公开(公告)日:2020-04-23
A resist underlayer film-forming composition having a dramatically improved crosslinking ability over conventional compositions, and further, a resist underlayer film-forming composition that crosslinks with a component of a resist material, in order to improve the adhesion of a resist underlayer film to a resist pattern. A resist underlayer film-forming composition for lithography including a copolymer having a structural unit of formula (1) and a structural unit of formula (2):
(wherein each R
1
is independently a hydrogen atom or a methyl group; each R
2
is independently a C
1-3
alkylene group; R
3
is a single bond or a methylene group; A is a linear, branched, or cyclic aliphatic group having a carbon atom number of 1 to 12 and optionally having a substituent, or a C
6-16
aromatic or heterocyclic group optionally having a substituent; and Pr is a protecting group); a crosslinking agent; an organic acid catalyst; and a solvent.
US7498394B2
申请人:——
公开号:US7498394B2
公开(公告)日:2009-03-03
[EN] (METH)ACRYLIC AND (METH)ACRYLAMIDE MONOMERS, POLYMERIZABLE COMPOSITIONS, AND POLYMERS OBTAINED<br/>[FR] MONOMERES (METH)ACRYLIQUES ET (METH)ACRYLAMIDES, COMPOSITIONS POLYMERISABLES, ET POLYMERES OBTENUS
申请人:UNIV COLORADO
公开号:WO2004077511A2
公开(公告)日:2004-09-10
The present invention provides novel (meth)acrylic and (meth)acrylamide monomers and polymers produced from those monomers. The monomers of the invention each include only a single vinyl functionality and at least one non-vinyl functionality that can be varied to achieve desired monomer/polymer properties. The invention additionally provides methods of producing polymers from these mono-vinyl monomers.