A fluorinated monomer has formula (1) wherein R
1
is H, F, methyl or trifluoromethyl, R
2
and R
3
are H or a monovalent hydrocarbon group, R
4
to R
6
each are a monovalent fluorinated hydrocarbon group, A is a divalent hydrocarbon group, and k
1
is 0, 1 or 2. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water slip, acid lability and hydrolysis and is useful as an additive polymer in formulating a resist composition.
一种
氟化单体具有式(1),其中R1为H,F,甲基或三
氟甲基,R2和R3为H或单价烃基,R4到R6各自为单价
氟化烃基,A为二价烃基,k1为0、1或2。从
氟化单体衍生的聚合物可以赋予适当的抗
水性、
水滑性、酸性易变性和
水解性,并且在制定抗蚀涂料组合物时作为添加聚合物是有用的。