RESIST COMPOSITION, ACID GENERATOR, POLYMERIC COMPOUND AND METHOD OF FORMING RESIST PATTERN
申请人:Tokyo Ohka Kogyo Co., Ltd.
公开号:US20150037734A1
公开(公告)日:2015-02-05
A resist composition containing a compound represented by general formula (m0), wherein R
1
and R
2
each independently represents an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent, provided that R
1
and R
2
may be mutually bonded to form a ring with the sulfur atom; R
3
represents an aromatic hydrocarbon group which may have a substituent, an alkenyl group which may have a substituent, or an alkynyl group which may have a substituent; V
1
represents a single bond or an alkylene group, provided that, when R
3
is an aromatic hydrocarbon group which may have a substituent, V
1
is an alkylene group; and X0
−
represents a monovalent organic anion.