1-[(4-Ethyl-2-methyl-9-tetracyclo[7.3.1.02,7.06,11]tridecanyl)oxy]ethyl 2,2-dimethylbutanoate

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 脂肪酰基
• 英文名称: 1-[(4-Ethyl-2-methyl-9-tetracyclo[7.3.1.02,7.06,11]tridecanyl)oxy]ethyl 2,2-dimethylbutanoate
• 英文别名: 1-[(4-ethyl-2-methyl-9-tetracyclo[7.3.1.02,7.06,11]tridecanyl)oxy]ethyl 2,2-dimethylbutanoate
• 化学式: C₂₄H₄₀O₃
• 分子量: 376.6
• InChiKey: HVLLDQMQRCUGAD-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  6.9
• 重原子数：
  27
• 可旋转键数：
  7
• 环数：
  5.0
• sp3杂化的碳原子比例：
  0.96
• 拓扑面积：
  35.5
• 氢给体数：
  0
• 氢受体数：
  3

文献信息

• PATTERN-FORMING METHOD, ELECTRON BEAM-SENSITIVE OR EXTREME ULTRAVIOLET RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, MANUFACTURING METHOD OF ELECTRONIC DEVICE USING THEM AND ELECTRONIC DEVICE
  申请人：Fujifilm Corporation

  公开号：US20140193749A1

  公开（公告）日：2014-07-10

  A pattern-forming method includes in this order: step (1) of forming a film with an electron beam-sensitive or extreme ultraviolet radiation-sensitive resin composition that contains (A) a resin having an acid-decomposable repeating unit and capable of decreasing a solubility of the resin (A) in a developer containing an organic solvent by an action of an acid, (B) a compound capable of generating an acid upon irradiation with an electron beam or extreme ultraviolet radiation and (C) a solvent; step (2) of exposing the film with an electron beam or extreme ultraviolet radiation; and step (4) of forming a negative pattern by development of the film with a developer containing an organic solvent after the exposing of the film, wherein a content of the compound (B) is 21% by mass to 70% by mass on the basis of all solids content of the composition.
• US9170489B2
  申请人：——

  公开号：US9170489B2

  公开（公告）日：2015-10-27