2-Methoxyethyl 2,2-difluoro-2-(trifluoromethylsulfonylsulfamoyl)acetate

• 分子结构分类: 有机化合物 - 有机酸及其衍生物 - 有机磺酸及其衍生物
• 英文名称: 2-Methoxyethyl 2,2-difluoro-2-(trifluoromethylsulfonylsulfamoyl)acetate
• 英文别名: 2-methoxyethyl 2,2-difluoro-2-(trifluoromethylsulfonylsulfamoyl)acetate
• 化学式: C₆H₈F₅NO₇S₂
• 分子量: 365.3
• InChiKey: GJJXZXNWNFDOQX-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  0.6
• 重原子数：
  21
• 可旋转键数：
  8
• 环数：
  0.0
• sp3杂化的碳原子比例：
  0.83
• 拓扑面积：
  133
• 氢给体数：
  1
• 氢受体数：
  13

文献信息

• POLYMER, RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
  申请人：Utsumi Yoshiyuki

  公开号：US20130022911A1

  公开（公告）日：2013-01-24

  A polymer containing an anion part which generates acid upon exposure on at least one terminal of the main chain, and at least one structural unit selected from the group consisting of a structural unit (a0) containing a —SO 2 -containing cyclic group, a structural unit (a3) containing at least one group selected from the group consisting of —OH, —COOH, —CN, —SO 2 NH 2 and —CONH 2 and a structural unit (a5) which generates acid upon exposure.
• RESIST COMPOSITION, COMPOUND, POLYMERIC COMPOUND AND METHOD OF FORMING RESIST PATTERN
  申请人：Tokyo Ohka Kogyo Co., Ltd.

  公开号：US20140356787A1

  公开（公告）日：2014-12-04

  A resist composition comprising a compound (m0) (wherein Rb 1 represents an electron withdrawing group; Rb 2 and Rb 3 each independently represents an aryl group, an alkyl group or an alkenyl group, provided that Rb 2 and Rb 3 may be mutually bonded to form a ring with the sulfur atom; and X0 − represents a monovalent counteranion).
• RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COMPOUND, COMPOUND
  申请人：Tokyo Ohka Kogyo Co., Ltd.

  公开号：US20150140497A1

  公开（公告）日：2015-05-21

  A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a base component (A) which exhibits changed solubility in a developing solution under action of acid, the base component (A) including a polymeric compound (A1) having a structural unit (a0) represented by general formula (a0-0) shown below (wherein V 11 represents an aliphatic cyclic group with or without a substituent; R 1 represents a lactam-containing cyclic group or a sultam-containing cyclic group; Y 1 represents an oxygen atom (—O—), an ester bond (—C(═O)—O—) or a single bond; and W 2 represents a group formed by a polymerization reaction of a polymerizable group-containing group).
• US8778595B2
  申请人：——

  公开号：US8778595B2

  公开（公告）日：2014-07-15
• US9244347B2
  申请人：——

  公开号：US9244347B2

  公开（公告）日：2016-01-26