COMPOSITIONS FOR CONTROLLED ASSEMBLY AND IMPROVED ORDERING OF SILICON-CONTAINING BLOCK COPOLYMERS
申请人:The Regents of the University of California
公开号:US20140197133A1
公开(公告)日:2014-07-17
The invention provides compositions and methods for inducing and enhancing order and nanostructures in organosilicon block copolymers compositions by including certain organic additives in such compositions that include one or more moieties comprising a hydrogen bond acceptor or a hydrogen bond donor. Such block copolymer compositions may be used, for example, as a mask for lithographic patterning as is used, for example, during various stages of semiconductor device fabrication.