申请人:Central Glass Company, Limited
公开号:EP2395040A1
公开(公告)日:2011-12-14
According to the present invention, a polymer is obtained by polycondensation of a fluorinated dicarboxylic acid derivative of the general formula (M-1) or an acid anhydride of the fluorinated dicarboxylic acid with a polyfunctional compound having two to four reactive groups corresponding in reactivity to carbonyl moieties of the fluorinated dicarboxylic acid derivative or acid anhydride.
[Chem. 134] AOCF2C-Q-CF2COA' (M-1)
In the above formula, Q represents a divalent organic group having a substituted or unsubstituted aromatic ring; and A and A' each independently represent an organic group. This polymer exhibits a sufficiently low dielectric constant for use as a semiconductor protection film and has the capability of forming a film at a relatively low temperature of 250°C or lower.
根据本发明,通过通式(M-1)的氟化二羧酸衍生物或氟化二羧酸的酸酐与多官能团化合物缩聚得到聚合物,多官能团化合物具有与氟化二羧酸衍生物或酸酐的羰基反应性相对应的 2 至 4 个活性基团。
[AOCF2C-Q-CF2COA' (M-1)
在上式中,Q 代表具有取代或未取代芳香环的二价有机基团;A 和 A'各自独立地代表一个有机基团。这种聚合物具有足够低的介电常数,可用作半导体保护膜,并能在 250°C 或更低的温度下形成薄膜。