申请人:SIEMENS AKTIENGESELLSCHAFT
公开号:US20150380168A1
公开(公告)日:2015-12-31
A two-ply, dielectric layer for a thin-layer capacitor, has a bottom, first ply formed of a self-assembled monolayer containing phosphorus oxo compounds and has a top, second ply serving as a planarization layer, the second ply containing guanidinium compounds.