A chemically amplified positive-type photosensitive resin composition capable of suppressing the occurrence of “footing” in which the width of the bottom (the side proximal to the surface of a support) becomes narrower than that of the top (the side proximal to the surface of a resist layer) in the nonresist portion; and the generation of development residue when a resist pattern serving as a template for a plated article is formed on a metal surface of a substrate using the photosensitive resin composition. A mercapto compound having a specific structure is included in the photosensitive resin composition, and includes an acid generator which generates acid upon exposure to an irradiated active ray or radiation, and a resin whose solubility in alkali increases under the action of acid.
一种
化学增感型正型光敏
树脂组合物,能够抑制“足部”现象的发生,即底部(靠近支撑表面的一侧)的宽度变窄,小于顶部(靠近抗蚀层表面的一侧)的宽度,同时在使用该光敏
树脂组合物在基板的
金属表面上形成用作电镀物品模板的抗蚀图案时,能够减少残留物的产生。该光敏
树脂组合物中包含一种具有特定结构的巯基化合物,其中包括一个酸发生剂,该酸发生剂在暴露于辐射活性光线或辐射时产生酸,以及一种
树脂,在酸的作用下其在碱性溶液中的溶解度增加。