3-(2-Adamantyloxy)-1,1-difluoro-3-oxopropane-1-sulfonic acid

• 分子结构分类: 有机化合物 - 有机酸及其衍生物 - 有机磺酸及其衍生物
• 英文名称: 3-(2-Adamantyloxy)-1,1-difluoro-3-oxopropane-1-sulfonic acid
• 英文别名: 3-(2-adamantyloxy)-1,1-difluoro-3-oxopropane-1-sulfonic acid
• 化学式: C₁₃H₁₈F₂O₅S
• 分子量: 324.34
• InChiKey: NKYGERWPZVPWKY-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  2.1
• 重原子数：
  21
• 可旋转键数：
  5
• 环数：
  4.0
• sp3杂化的碳原子比例：
  0.92
• 拓扑面积：
  89
• 氢给体数：
  1
• 氢受体数：
  7

文献信息

• US20140255854A1
  申请人：——

  公开号：US20140255854A1

  公开（公告）日：2014-09-11
• PHOTOSENSITIVE COMPOSITION FOR EUV LIGHT, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
  申请人：FUJIFILM Corporation

  公开号：US20210405530A1

  公开（公告）日：2021-12-30

  A photosensitive composition for EUV light includes a resin X of which a polarity is increased by an action of an acid so that a solubility in an alkali developer is increased and a solubility in an organic solvent is decreased, and a photoacid generator; or a resin Y which includes a repeating unit having a photoacid generating group and of which a polarity is increased by an action of an acid so that a solubility in an alkali developer is increased and a solubility in an organic solvent is decreased, in which the photosensitive composition for EUV light satisfies both Requirement 1 and Requirement 2.
• US9229323B2
  申请人：——

  公开号：US9229323B2

  公开（公告）日：2016-01-05