[1-(2,2-Dimethylpropyl)cyclopentyl] 2,2-dimethylbutanoate

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 脂肪酰基
• 英文名称: [1-(2,2-Dimethylpropyl)cyclopentyl] 2,2-dimethylbutanoate
• 英文别名: [1-(2,2-dimethylpropyl)cyclopentyl] 2,2-dimethylbutanoate
• 化学式: C₁₆H₃₀O₂
• 分子量: 254.41
• InChiKey: FGMNPYJGGAFIQJ-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  5
• 重原子数：
  18
• 可旋转键数：
  6
• 环数：
  1.0
• sp3杂化的碳原子比例：
  0.94
• 拓扑面积：
  26.3
• 氢给体数：
  0
• 氢受体数：
  2

文献信息

• RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：SHIN-ETSU CHEMICAL CO., LTD.

  公开号：US20160152755A1

  公开（公告）日：2016-06-02

  A resist composition comprising a polymer comprising recurring units of lactone and a PAG is provided. The resist composition has a high dissolution contrast during organic solvent development, and improved resist properties including MEF and CDU and forms a fine hole pattern with improved roundness and size control.