[EN] LAPPING SLURRY HAVING A CATIONIC SURFACTANT<br/>[FR] SUSPENSION ÉPAISSE À RODER CONTENANT UN TENSIOACTIF CATIONIQUE
申请人:DIAMOND INNOVATIONS INC
公开号:WO2015026477A1
公开(公告)日:2015-02-26
A lapping slurry and method of making the lapping slurry are provided. The lapping slurry comprises abrasive grains dispersed in a carrier. The carrier comprises water, ethylene glycol and between about 0.5 wt% to about 60 wt% surfactant. Abrasive particles are positively charged when dispersed in ethylene glycol having a pH in a range of from 5 to 9, as evidenced by zeta potentials.