methacrylic acid-(β,β,β-trifluoro-isopropyl ester) | 691-74-7

• 分子结构分类: 有机化合物 - 有机酸及其衍生物 - 羧酸及其衍生物
• 英文名称: methacrylic acid-(β,β,β-trifluoro-isopropyl ester)
• 英文别名: Methacrylsaeure-(β,β,β-trifluor-isopropylester)；Methacrylic acid 2,2,2-trifluoro-1-methylethyl ester；1,1,1-trifluoropropan-2-yl 2-methylprop-2-enoate
• CAS: 691-74-7
• 化学式: C₇H₉F₃O₂
• 分子量: 182.142
• InChiKey: WSZQNZRTSRYAHA-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  3
• 重原子数：
  12
• 可旋转键数：
  3
• 环数：
  0.0
• sp3杂化的碳原子比例：
  0.57
• 拓扑面积：
  26.3
• 氢给体数：
  0
• 氢受体数：
  5

反应信息

• 作为产物：
  描述：

  1,1,1-三氟异丙醇 、 甲基丙烯酰氯 生成 methacrylic acid-(β,β,β-trifluoro-isopropyl ester)
  参考文献：
  名称：

  Jakubowitsch et al., Zhurnal Obshchei Khimii, 1958, vol. 28, p. 2288,2291;engl.Ausg.S.2325,2327

  摘要：

  DOI：

文献信息

• COMPOUND, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
  申请人：SUMITOMO CHEMICAL COMPANY, LIMITED

  公开号：US20160130210A1

  公开（公告）日：2016-05-12

  A compound represented by formula (I), a resin including a structural unit derived from the compound and a resist composition including the resin: wherein R 1 represents a hydrogen atom, a halogen atom or a C 1 to C 6 alkyl group in which a hydrogen atom may be replaced by a halogen atom, R 2 represents a C 1 to C 6 perfluoroalkyl group or *—CHR f1 R f2 , * represents a binding site to a carbonyl group, R f1 and R f2 each independently represent a C 1 to C 4 perfluoroalkyl group or R f1 and R f2 may be bonded together with a carbon atom bonded thereto to form a ring, A 1 represents a single bond, a C 1 to C 6 alkanediyl group or **-A 3 -X 1 -(A 4 -X 2 ) a -(A 5 ) b -, ** represents a binding site to an oxygen atom, A 2 , A 3 , A 4 and A 5 each independently represent a C 1 to C 6 alkanediyl group, X 1 and X 2 each independently represent —O—, —CO—O— or —O—CO—, a and b each represent 0 or 1, and W 1 represents a C 5 to C 18 divalent alicyclic hydrocarbon group.

  化合物的化学式为（I），包括从该化合物衍生的结构单元的树脂和包括该树脂的抗蚀组合物： 其中R 1 代表氢原子、卤素原子或C 1 到C 6 烷基基团，其中氢原子可以被卤素原子取代，R 2 代表C 1 到C 6 全氟烷基基团或*—CHR f1 R f2 ，*代表与羰基结合位点，R f1 和R f2 各自独立代表C 1 到C 4 全氟烷基基团或R f1 和R f2 可以与结合在一起的碳原子形成环，A 1 代表单键，C 1 到C 6 烷二基基团或**-A 3 -X 1 -(A 4 -X 2 ) a -(A 5 ) b -，**代表与氧原子结合位点，A 2 、A 3 、A 4 和A 5 各自独立代表C 1 到C 6 烷二基基团，X 1 和X 2 各自独立代表—O—、—CO—O—或—O—CO—，a和b各自代表0或1，W 1 代表C 5 到C 18 的二价脂环烃基团。
• PHOTORESIST COMPOSITION AND METHOD FOR PRODUCING PHOTORESIST PATTERN
  申请人：SUMITOMO CHEMICAL COMPANY, LIMITED

  公开号：US20160195809A1

  公开（公告）日：2016-07-07

  A photoresist composition comprising a resin having an acid-labile group; a salt represented by the formula (I); and a salt represented by the formula (B1).

  一种包括具有酸敏基团的树脂、由化学式（I）表示的盐以及由化学式（B1）表示的盐的光刻胶组合物。
• NON-IONIC COMPOUND, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
  申请人：SUMITOMO CHEMICAL COMPANY, LIMITED

  公开号：US20160145186A1

  公开（公告）日：2016-05-26

  A compound which is non-ionic compound, the compound has a group represented by formula (Ia): wherein R 2 represents a group having a C 3 to C 18 alicyclic hydrocarbon group where a methylene group may be replaced by an oxygen atom or a carbonyl group, Rf 1 and Rf 2 each independently represent a C 1 to C 4 perfluoroalkyl group, and * represents a binding site.

  一种非离子化合物，该化合物具有由式(Ia)表示的基团：其中R2代表具有C3到C18脂环烃基团的基团，其中亚甲基基团可以被氧原子或羰基取代，Rf1和Rf2分别独立地代表C1到C4全氟烷基基团，*代表一个结合位点。
• COMPOUND, RESIN AND PHOTORESIST COMPOSITION
  申请人：SUMITOMO CHEMICAL COMPANY, LIMITED

  公开号：US20160237190A1

  公开（公告）日：2016-08-18

  A compound represented by formula (I): wherein R 1 represents a hydrogen atom or a methyl group; R 2 represents a C1-C12 hydrocarbon group; X a and X b each independently represent an oxygen atom or a sulfur atom; X 11 represents a C1-C12 divalent saturated hydrocarbon group where a hydrogen atom can be replaced by a fluorine atom; and A 1 represents a C1-C12 divalent saturated hydrocarbon group or *-A 2 -X 1 -(A 3 -X 2 ) a -A 4 -, where * represents a binding site to an oxygen atom, A 2 , A 3 and A 4 each independently represent a C1-C12 divalent hydrocarbon group, X 1 and X 2 each independently represent —O—, —CO—O—, —O—CO— or —O—CO—O—, and “a” represents 0 or 1.

  化合物的化学式（I）表示为：其中R1代表氢原子或甲基基团；R2代表一个C1-C12烃基团；Xa和Xb分别代表氧原子或硫原子；X11代表一个C1-C12二价饱和碳氢基团，其中氢原子可以被氟原子取代；A1代表一个C1-C12二价饱和碳氢基团或*-A2-X1-(A3-X2)a-A4-，其中*代表与氧原子结合的位点，A2、A3和A4分别代表一个C1-C12二价碳氢基团，X1和X2分别代表—O—、—CO—O—、—O—CO—或—O—CO—O—，而“a”代表0或1。
• SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME
  申请人：SUMITOMO CHEMICAL COMPANY, LIMITED

  公开号：US20170247323A1

  公开（公告）日：2017-08-31

  A salt having a group represented by the formula (aa): wherein X a and X b independently each represent an oxygen atom or a sulfur atom, the ring W represents a C3-C36 heterocyclic ring which has an ester bond or a thioester bond, said heterocyclic ring optionally further having an oxygen atom, a sulfur atom, a carbonyl group or a sulfonyl group each by which a methylene group has been replaced, and said heterocycilic ring optionally having a hydroxyl group, a cyano group, a carboxyl group, a C1-C12 alkyl group, a C1-C12 alkoxy group, a C2-C13 alkoxycarbonyl group, a C2-C13 acyl group, a C2-C13 acyloxy group, a C3-C12 alicyclic hydrocarbon group, a C6-C10 aromatic hydrocarbon group or any combination of these groups each by which a hydrogen atom has been replaced, and * represents a binding position.

  一种盐，其具有由公式（aa）表示的基团：其中Xa和Xb独立地代表一个氧原子或一个硫原子，环W代表一个具有酯键或硫酯键的C3-C36杂环环，该杂环环还可以进一步具有一个氧原子、一个硫原子、一个羰基或一个磺酰基，其中每个都已被一个亚甲基取代，该杂环环还可以具有一个羟基、一个氰基、一个羧基、一个C1-C12烷基、一个C1-C12烷氧基、一个C2-C13烷氧羰基、一个C2-C13酰基、一个C2-C13酰氧基、一个C3-C12脂环烃基、一个C6-C10芳香烃基或任何组合，其中每个都已被氢原子取代，*表示一个结合位置。