申请人:NISSAN CHEMICAL INDUSTRIES, LTD.
公开号:US20170108777A1
公开(公告)日:2017-04-20
An additive for a resist underlayer film-forming composition containing a copolymer having structural units of Formulae (1) to (4), and a resist underlayer film-forming composition containing the additive:
(where each R
1
is independently a hydrogen atom or methyl group, Ar is arylene group, Pr is a protecting group or a hydrogen atom, X is a direct bond or a —C(═O)O—R
2
— group, R
2
constituting the —C(═O)O—R
2
— group is a C
1-3
alkylene group, the alkylene group is bonded to a sulfur atom, R
3
is a hydrogen atom, methyl group, methoxy group, or halogeno group, R
4
is a C
1-3
alkyl group in which at least one hydrogen atom is substituted with a fluoro group, and Z is an organic group having 4 to 7-membered ring lactone skeleton, adamantane skeleton, or norbornane skeleton).