A resist composition which contains a resin (A1) which has a structural unit having a sulfonyl group, a structural unit represented by formula (II) and a structural unit having an acid-labile group, and an acid generator:
wherein R1 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group that may have a halogen atom, L1 represents a single bond or *-L2-CO—O-(L3-CO—O)g— where * represents a binding position to an oxygen atom, L2 and L3 independently represent a C1 to C12 divalent hydrocarbon group, “g” represents 0 or 1, and R3 represents a C1 to C12 liner or branched alkyl group except for a tertiary alkyl group.
一种抗蚀剂组合物,其中包含一种
树脂 (A1),该
树脂具有具有磺酰基的结构单元、由式 (II) 表示的结构单元和具有耐酸基的结构单元,以及一种酸发生器:
其中 R1 代表氢原子、卤素原子或可能具有卤素原子的 C1 至 C6 烷基,L1 代表单键或 *-
L2-CO-O-(L3-CO-O)g-,其中 * 代表与氧原子的结合位置,
L2 和 L3 独立地代表 C1 至 C12 二价烃基,"g "代表 0 或 1,R3 代表 C1 至 C12 直链或支链烷基(叔烷基除外)。