申请人:——
公开号:US20010012596A1
公开(公告)日:2001-08-09
Compounds of the formulae I, II, III, IV and V
1
R
1
i.a. is C
4
-C
9
cycloalkanoyl, C
1
-C
12
alkanoyl, C
4
-C
6
alkenoyl, or benzoyl; R
2
is for example phenyl, C
1
-C
20
alkyl, C
3
-C
8
cycloalkyl, C
2
-C
20
alkanoyl, or benzoyl; Ar
1
is R
4
S-phenyl or NR
5
R
6
-phenyl, each of which optionally is substituted; or Ar, i.a. is
2
optionally substituted; or Ar
1
is naphthyl or anthracyl each of which is unsubstituted or substituted; or Ar
1
is benzoyl, naphthalenecarbonyl, phenanthrenecarbonyl, anthracenecarbonyl or pyrenecarbonyl, each of which is unsubstituted or substituted, or Ar
1
is 3,4,5-trimethoxyphenyl, phenoxyphenyl or biphenyl; Ar
2
i.a. is
3
optionally substituted, or naphthyl or anthracyl, each of which is unsubstituted or substituted, x is 2 or 3; M
1
when x is 2, for example is phenylene, naphthalene, anthracylene, each of which optionally is substituted; M
1
, when x is 3, is a trivalent radical; M
2
for example is
4
M
3
is for example C
1
-C
12
alkylene, cyclohexylene, or phenylene; n is 1-20; R
3
is for example hydrogen or C
1
-C
12
alkyl; R
3
′ i.a. is C
1
-C
12
alkyl; substituted or -O-interrupted C
2
-C
6
alkyl; R
4
is for example hydrogen, or C
1
-C
12
alkyl; and R
5
and R
6
independently of each other i.a. are hydrogen, C
1
-C
12
alkyl, or phenyl; are suitable as photoinitiators in particular in resist applications.
式I、II、III、IV和V1R1i.a.的化合物中,C4-C9环烷酰基、C1-C12脂肪酰基、C4-C6烯酰基或苯甲酰基为例;R2例如为苯基、C1-C20烷基、C3-C8环烷基、C2-C20脂肪酰基或苯甲酰基;Ar1为R4S-苯基或NR5R6-苯基,可以选择地取代;或Ar,例如是可选择地取代的;或Ar1为萘基或蒽基,每个都是未取代或取代的;或Ar1为苯甲酰基、萘基甲酰基、菲甲酰基、蒽甲酰基或芘甲酰基,每个都是未取代或取代的,或Ar1为3,4,5-三甲氧基苯基、苯氧基苯基或联苯基;Ar2i.a.是可选择地取代的,或萘基或蒽基,每个都是未取代或取代的,x为2或3;当x为2时,M1例如为苯基、萘基、蒽基,每个可以选择地取代;当x为3时,M1是三价基团;M2例如为4;M3例如为C1-C12亚烷基、环己亚烷基或苯基;n为1-20;R3例如为氢或C1-C12烷基;R3′ i.a.是C1-C12烷基;取代或-O中断的C2-C6烷基;R4例如为氢或C1-C12烷基;R5和R6独立地为氢、C1-C12烷基或苯基;在特别是光刻应用中,适用作光引发剂。