Radiation sensitive refractive index changing composition, pattern forming method and optical material
申请人:JSR Corporation
公开号:EP1494072A2
公开(公告)日:2005-01-05
There is provided a radiation sensitive refractive index changing composition containing an inorganic oxide particle, a polymerizable compound, a radiation sensitive decomposer and an escapable compound. The radiation sensitive decomposer decomposes upon exposure to radiation to form an acid, base or radical, and this decomposed product increases the molecular weight of the polymerizable compound.
提供了一种辐射敏感的折射率变化组合物,其中包含无机氧化物颗粒、可聚合化合物、辐射敏感分解剂和可逸出化合物。辐射敏感分解剂在受到辐射时会分解形成酸、碱或自由基,这种分解产物会增加可聚合化合物的分子量。