申请人:3M INNOVATIVE PROPERTIES COMPANY
公开号:US20220040655A1
公开(公告)日:2022-02-10
Compositions including one or more fluorochemical surfactants of the formula: (I) where R
f
is a perfluoroalkyl group, each of R
1
, R
2
and R
3
are C
1
-C
20
alkyl, alkoxy, or aryl; and R
4
is alkylene, arylene of a combination thereof. R
4
is preferably an alkylene of 1-20 carbons that may be cyclic or acyclic, may optionally contain catenated or terminal heteroatoms selected from the group consisting of N, O, and S. Most preferably R
4
is an alkylene of 2-10 carbon atoms. Described are anionic N-substituted fluorinated amine oxide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates.
包括一个或多个具有以下结构的氟化学表面活性剂的组合物:(I)其中Rf是全氟烷基基团,R1、R2和R3分别是C1-C20烷基、烷氧基或芳基;R4是烷基、芳基或二者的组合。R4最好是1-20个碳的烷基,可以是环状或非环状,也可以选择性地包含来自N、O和S的串联或末端杂原子。最好是R4是2-10个碳原子的烷基。描述了阴离子N-取代的氟化胺氧表面活性剂,以及其在清洁和酸蚀溶液中的使用。这些清洁和蚀刻溶液可用于各种基底,例如用于硅氧化物基底的清洁和蚀刻。